大族思特5轴振镜微加工系统参数：
| 项目/ltem | 单位/Unit | 参数/Parameter | |||||||
|
电源参数 Power Supply |
输入电压 Input Voltage | VAC | 170-264 | ||||||
| 输出电压 Output Voltage | VDC | ±15 | |||||||
| 额定输出电流 Current | A | 10 | |||||||
|
控制卡参数 Control Card |
输出接口 Input interface | XY2-100协议 | |||||||
| 输入接口 Output interface | 网口 Entermet Port | ||||||||
|
环境要求 Environmental Requirement |
工作温度 Ambient temperature | ℃ | 0～+40 | ||||||
| 存储温度 Storage temperature | ℃ | 一10～+60 | |||||||
| 湿度 Humidity | ≤75%无凝结 | ||||||||
| 激光器参数 | 波长 Wavelenth | nm | Wavelength 1030 nm or 1064 nm | ||||||
| 典型激光功率 Typical average power | W | ≤100w | |||||||
| 典型脉宽 Typical pulse length | 250fs to 20ps | ||||||||
| 激光器参数 | |||||||||
|
工作范围 Working field size (diameter, depending on nozzle opening) |
mm | φ0.8mm to φ3.0mm | |||||||
|
Z方向最大变焦范围 Maximum focus range in z direction |
mm | ±1mm | |||||||
|
系统入射光斑大小 entrance beam diameter (1/e2) |
mm | 10mm | |||||||
|
聚焦光斑大小(1/e²)M²=1 focus diameter in image field (1/e²) for M² = 1 |
um | 25um | |||||||
|
最大进给角度 Maximum angle of incidence |
18° | ||||||||
|
旋进频率 Precession frequency |
HZ | 200-600HZ（12000-36000rpm） | |||||||
|
物镜焦距 Objective focal length |
mm | 50mm | |||||||
|
重复精度 Repeatability |
um | ≤0.5um（常温老化8H） | |||||||
|
入射角的理论分辨率 Theoretical resolution of incidence angle |
urad | 2urad | |||||||
| 尺寸 Dimension(L*W*H) | mm | 601×280×274 | |||||||
| 重量 Weight | Kg | 23.5 | |||||||
